1.High processing accuracy due to superprecision linear motion pair adopted in moving parts.

1.运动部分采用高精轴承运动副,组角精高。

2.The features and applications in superprecision turnings of piezoelectric ceramic inching motion devices are introduced.

2.绍了压电陶瓷微动机构特点及在超精密车削加工中多种用途。