High processing accuracy due to superprecision linear motion pair adopted in moving parts.
运动部分采用高精度直线轴承运动副,组角精度高。
High processing accuracy due to superprecision linear motion pair adopted in moving parts.
运动部分采用高精度直线轴承运动副,组角精度高。
The features and applications in superprecision turnings of piezoelectric ceramic inching motion devices are introduced.
介电陶瓷微动机构的能特点及在超精密工中的多种用途。
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